Issued Patents All Time
Showing 26–50 of 195 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068169 | Semiconductor processing tool and methods of operation | Ji Cui, Chih-Hung Chen, Liang-Guang Chen | 2024-08-20 |
| 12046661 | Fin-type field effect transistor | Chun Hsiung Tsai | 2024-07-23 |
| 12036636 | Mega-sonic vibration assisted chemical mechanical planarization | Chun-Hao Kung, Shang-Yu Wang, Ching-Hsiang Tsai, Hui-Chi Huang | 2024-07-16 |
| 12030159 | Chemical mechanical planarization tool | Tung-Kai Chen, Shang-Yu Wang, Wan-Chun Pan, Zink Wei, Hui-Chi Huang | 2024-07-09 |
| 12021117 | Semiconductor structure and method of forming the same | Te-Ming Kung, Ying-Lang Wang, Wen-Hsi Lee, Shu-Wei Chang | 2024-06-25 |
| 12002854 | Semiconductor device and method of manufacture | Heng-Wen Ting, Chii-Horng Li, Pei-Ren Jeng, Hsueh-Chang Sung, Yen-Ru Lee +1 more | 2024-06-04 |
| 12002684 | Methods for chemical mechanical polishing and forming interconnect structure | Ji Cui, Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin +7 more | 2024-06-04 |
| 11991936 | Method of forming a FinFET device | Chang-Miao Liu, Bwo-Ning Chen | 2024-05-21 |
| 11984323 | CMP system and method of use | Te-Chien Hou, Yu-Ting Yen, Cheng-Yu Kuo, Chih-Hung Chen, William Weilun Hong | 2024-05-14 |
| 11964358 | Chemical mechanical polishing apparatus and method | Shang-Yu Wang, Chun-Hao Kung, Ching-Hsiang Tsai, Hui-Chi Huang | 2024-04-23 |
| 11951587 | Zone-based CMP target control | Che-Liang Chung, Che-Hao Tu, Chih-Wen Liu | 2024-04-09 |
| 11929398 | FinFET structure and method for manufacturing thereof | Chun Hsiung Tsai, Lai-Wan Chong, Chien-Wei Lee | 2024-03-12 |
| 11904430 | Temperature control in chemical mechanical polish | Chih-Hung Chen | 2024-02-20 |
| 11854827 | Magnetic slurry for highly efficiency CMP | Yen-Ting Chen, Chun-Hao Kung, Tung-Kai Chen, Hui-Chi Huang | 2023-12-26 |
| 11854872 | Semiconductor device structure with interconnect structure and method for forming the same | Chun-Hao Kung, Chih-Chieh Chang, Kao-Feng Liao, Hui-Chi Huang | 2023-12-26 |
| 11850704 | Methods to clean chemical mechanical polishing systems | Chih-Chieh Chang, Yen-Ting Chen, Hui-Chi Huang | 2023-12-26 |
| 11854901 | Semiconductor method and device | Cheng-Hsiung Yen, Ta-Chun Ma, Chien-Chang Su, Jung-Jen Chen, Pei-Ren Jeng +1 more | 2023-12-26 |
| 11772228 | Chemical mechanical polishing apparatus including a multi-zone platen | Ting-Hsun Chang, Hung Yen, Chi-Hsiang Shen, Fu-Ming Huang, Chun-Chieh Lin +4 more | 2023-10-03 |
| 11761751 | Thin film metrology | Chih-Hung Chen, Te-Ming Kung | 2023-09-19 |
| 11728215 | Fin Field-Effect Transistor device and method of forming the same | Shich-Chang Suen, Liang-Guang Chen | 2023-08-15 |
| 11728172 | Wafer thinning apparatus having feedback control | Yuan-Hsuan Chen, Ying-Lang Wang, Kuo-Hsiu Wei | 2023-08-15 |
| 11718812 | Post-CMP cleaning composition for germanium-containing substrate | Ji Cui, William Weilun Hong, Gin-Chen Huang, Shich-Chang Suen | 2023-08-08 |
| 11712778 | Chemical mechanical planarization tool | Tung-Kai Chen, Shang-Yu Wang, Wan-Chun Pan, Zink Wei, Hui-Chi Huang | 2023-08-01 |
| 11710659 | Metal loss prevention using implantation | Li-Chieh Wu, Tang-Kuei Chang, Kuo-Hsiu Wei, Ying-Lang Wang, Su-Hao Liu +5 more | 2023-07-25 |
| 11694889 | Chemical mechanical polishing cleaning system with temperature control for defect reduction | Ssutzu Chen, Gin-Chen Huang, Ya-Ting Tsai, Ying-Tsung Chen | 2023-07-04 |