Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694889 | Chemical mechanical polishing cleaning system with temperature control for defect reduction | Gin-Chen Huang, Ya-Ting Tsai, Ying-Tsung Chen, Kei-Wei Chen | 2023-07-04 |