Issued Patents All Time
Showing 176–200 of 468 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7444911 | Slitter blade assembly | Akihiro Sanda, Sampei Iida, Fujio Kuwabara | 2008-11-04 |
| 7446287 | Induction heating cooker with buoyancy reducing plate | Hiroshi Tominaga, Chika Mae | 2008-11-04 |
| 7425703 | Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method | Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Takeshi Murakami, Toshifumi Kimba +1 more | 2008-09-16 |
| 7423267 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Takao Kato +7 more | 2008-09-09 |
| 7420164 | Objective lens, electron beam system and method of inspecting defect | Mamoru Nakasuji, Tohru Satake, Hirosi Sobukawa, Takeshi Murakami, Nobuharu Noji | 2008-09-02 |
| 7417244 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake +2 more | 2008-08-26 |
| 7417723 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2008-08-26 |
| 7411207 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ohshima, Akira Hamamatsu, Tetsuya Watanabe +1 more | 2008-08-12 |
| 7411191 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2008-08-12 |
| 7408175 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Nobuharu Noji, Takeshi Murakami +6 more | 2008-08-05 |
| 7400829 | Transmission apparatus and path selection method of a transmission apparatus | — | 2008-07-15 |
| 7391036 | Sample surface inspection apparatus and method | Masahiro Hatakeyama, Takeshi Murakami, Tohru Satake, Nobuharu Noji | 2008-06-24 |
| 7365324 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more | 2008-04-29 |
| 7361895 | Electron beam apparatus and a device manufacturing method by using said electron beam apparatus | Mamoru Nakasuji, Takao Kato, Nobuharu Noji, Tohru Satake, Takeshi Murakami | 2008-04-22 |
| 7355643 | Image pickup device | Kenichi Shimomura, Yoshikazu Kondo, Yoichi Kato | 2008-04-08 |
| 7352195 | Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus | Tohru Satake, Nobuharu Noji, Takeshi Murakami, Tsutomu Karimata, Yuichiro Yamazaki +2 more | 2008-04-01 |
| 7352890 | Method for analyzing circuit pattern defects and a system thereof | Atsushi Shimoda, Ichirou Ishimaru, Yuji Takagi, Takuo Tamura, Yuichi Hamamura +2 more | 2008-04-01 |
| 7351969 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Hirosi Sobukawa, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa, Tsutomu Karimata +7 more | 2008-04-01 |
| 7336303 | Imaging device | Kenichi Shimomura, Yoshikazu Kondo, Youichi Kato | 2008-02-26 |
| 7312449 | Electron beam system and method of manufacturing devices using the system | Mamoru Nakasuji, Takao Kato, Tohru Satake, Takeshi Murakami, Nobuharu Noji | 2007-12-25 |
| 7285010 | TDI detecting device, a feed-through equipment and electron beam apparatus using these devices | Masahiro Hatakeyama, Tohru Satake, Takeshi Murakami, Nobuharu Noji | 2007-10-23 |
| 7260940 | Heat pump using gas hydrate, and heat utilizing apparatus | Tomonari Ito, Tomohiro Ogawa | 2007-08-28 |
| 7261974 | Battery-driven power source apparatus | Noboru Sato, Junichi Kikuchi, Atsuhiro Naganuma, Satoyoshi Ohya | 2007-08-28 |
| 7262425 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ohshima, Akira Hamamatsu, Tetsuya Watanabe +1 more | 2007-08-28 |
| 7256412 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ooshima, Akira Hamamatsu, Tetsuya Watanabe +1 more | 2007-08-14 |