Issued Patents All Time
Showing 76–100 of 135 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8211238 | System, method and apparatus for self-cleaning dry etch | Shrikant Lohokare, Arthur M. Howald, Yunsang Kim | 2012-07-03 |
| 8185242 | Dynamic alignment of wafers using compensation values obtained through a series of wafer movements | Scott Wong, Jeffrey Lin, Jack Chen, Benjamin W. Mooring, Chung-Ho Huang | 2012-05-22 |
| 8154209 | Modulated multi-frequency processing method | Alexei Marakhtanov, Eric A. Hudson, Rajhinder Dhindsa | 2012-04-10 |
| 8137501 | Bevel clean device | Yunsang Kim, Greg Sexton, Keechan Kim, Andras Kuthi | 2012-03-20 |
| 8135485 | Offset correction techniques for positioning substrates within a processing chamber | Jack Chen, Ben Mooring, Stephen J. Cain | 2012-03-13 |
| 8127395 | Apparatus for isolated bevel edge clean and method for using the same | Hyungsuk Alexander Yoon, Jason A. Ryder, Mark Wilcoxson, Jeffrey G. Gasparitsch, Randy Johnson +1 more | 2012-03-06 |
| 8083890 | Gas modulation to control edge exclusion in a bevel edge etching plasma chamber | Tong Fang, Yunsang Kim, Olivier Rigoutat, George Stojakovic | 2011-12-27 |
| 8017516 | Method for stress free conductor removal | Shrikant Lohokare | 2011-09-13 |
| 7981307 | Method and apparatus for shaping gas profile near bevel edge | Jack Chen, Iqbal Shareef | 2011-07-19 |
| 7959984 | Methods and arrangement for the reduction of byproduct deposition in a plasma processing system | Shrikant Lohokare | 2011-06-14 |
| 7943007 | Configurable bevel etcher | Alan M. Schoepp, Gregory Sexton, Yunsang Kim, William S. Kennedy | 2011-05-17 |
| 7938931 | Edge electrodes with variable power | Gregory Sexton, Andras Kuthi | 2011-05-10 |
| 7922866 | Apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer | Gregory Sexton, Alan M. Schoepp, John D. Boniface | 2011-04-12 |
| 7909960 | Apparatus and methods to remove films on bevel edge and backside of wafer | Yunsang Kim | 2011-03-22 |
| 7858898 | Bevel etcher with gap control | Alan M. Schoepp, Gregory Sexton, Andras Kuthi, Yunsang Kim, William S. Kennedy | 2010-12-28 |
| 7718542 | Low-k damage avoidance during bevel etch processing | Yunsang Kim, Jack Chen | 2010-05-18 |
| 7691278 | Apparatus for the removal of a fluorinated polymer from a substrate and methods therefor | Hyungsuk Alexander Yoon, John M. Boyd, Andras Kuthi | 2010-04-06 |
| 7680712 | Electronic processing system | Scott Thomson | 2010-03-16 |
| 7662253 | Apparatus for the removal of a metal oxide from a substrate and methods therefor | Hyungsuk Alexander Yoon, William Thie, Yezdi Dordi | 2010-02-16 |
| 7662254 | Methods of and apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer | Gregory Sexton, Alan M. Schoepp, John D. Boniface | 2010-02-16 |
| 7651585 | Apparatus for the removal of an edge polymer from a substrate and methods therefor | Hyungsuk Alexander Yoon, Yunsang Kim, Jason A. Ryder | 2010-01-26 |
| 7653515 | Expert knowledge methods and systems for data analysis | Puneet Yadav | 2010-01-26 |
| 7611640 | Minimizing arcing in a plasma processing chamber | Arthur M. Howald, Andras Kuthi, Butch Berney | 2009-11-03 |
| 7575638 | Apparatus for defining regions of process exclusion and process performance in a process chamber | Jack Chen, Yunsang Kim, Gregory Sexton | 2009-08-18 |
| 7540935 | Plasma oxidation and removal of oxidized material | Yunsang Kim, Hyungsuk Alexander Yoon, Arthur M. Howald | 2009-06-02 |