Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8349202 | Methods for controlling bevel edge etching in a plasma chamber | Tong Fang, Yunsang Kim, Andrew D. Bailey, III, George Stojakovic | 2013-01-08 |
| 8083890 | Gas modulation to control edge exclusion in a bevel edge etching plasma chamber | Tong Fang, Yunsang Kim, Andrew D. Bailey, III, George Stojakovic | 2011-12-27 |