Issued Patents All Time
Showing 126–135 of 135 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6838832 | Apparatus and methods for improving the stability of RF power delivery to a plasma load | Arthur M. Howald, Andras Kuthi | 2005-01-04 |
| 6821899 | System, method and apparatus for improved local dual-damascene planarization | Shrikant Lohokare, David Hemker, Joel M. Cook | 2004-11-23 |
| 6744213 | Antenna for producing uniform process rates | Mark Wilcoxson | 2004-06-01 |
| 6723574 | Method for quantifying uniformity patterns and including expert knowledge for tool development and control | Puneet Yadav, Pratik Misra | 2004-04-20 |
| 6653791 | Method and apparatus for producing uniform process rates | Alan M. Schoepp, Andras Kuthi | 2003-11-25 |
| 6518705 | Method and apparatus for producing uniform process rates | Mark Wilcoxson, Andras Kuthi, Michael G. R. Smith, Alan M. Schoepp | 2003-02-11 |
| 6341574 | Plasma processing systems | Alan M. Schoepp, David Hemker, Mark Wilcoxson, Andras Kuthi | 2002-01-29 |
| 6322661 | Method and apparatus for controlling the volume of a plasma | Alan M. Schoepp, Nicolas Bright | 2001-11-27 |
| 6320320 | Method and apparatus for producing uniform process rates | Alan M. Schoepp, Andras Kuthi | 2001-11-20 |
| 6302966 | Temperature control system for plasma processing apparatus | Alan M. Schoepp, Michael G. R. Smith, Andras Kuthi | 2001-10-16 |