Issued Patents All Time
Showing 51–75 of 135 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8883027 | Methods for removing a metal oxide from a substrate | Hyungsuk Alexander Yoon, William Thie, Yezdi Dordi | 2014-11-11 |
| 8869742 | Plasma processing chamber with dual axial gas injection and exhaust | Rajinder Dhindsa, Alexei Marakhatnov | 2014-10-28 |
| 8852384 | Method and apparatus for detecting plasma unconfinement | Keechan Kim, Yunsang Kim | 2014-10-07 |
| 8764907 | Servicing a plasma processing system with a robot | — | 2014-07-01 |
| 8721908 | Bevel etcher with vacuum chuck | Alan M. Schoepp, Gregory Sexton, William S. Kennedy | 2014-05-13 |
| 8691701 | Strip with reduced low-K dielectric damage | Bing Ji, Maryam Moravej, Stephen M. Sirard | 2014-04-08 |
| 8673111 | Plasma processing chamber for bevel edge processing | Yunsang Kim | 2014-03-18 |
| 8652298 | Triode reactor design with multiple radiofrequency powers | Rajinder Dhindsa, Alexei Marakhtanov, Gerardo Delgadino, Eric A. Hudson, Bi-Ming Yen | 2014-02-18 |
| 8580078 | Bevel etcher with vacuum chuck | Alan M. Schoepp, Gregory Sexton, William S. Kennedy | 2013-11-12 |
| 8574397 | Bevel edge plasma chamber with top and bottom edge electrodes | Gregory Sexton, Andras Kuthi | 2013-11-05 |
| 8500951 | Low-K damage avoidance during bevel etch processing | Yunsang Kim, Jack Chen | 2013-08-06 |
| 8475624 | Method and system for distributing gas for a bevel edge etcher | Greg Sexton, Alan Schoen | 2013-07-02 |
| 8470126 | Wiggling control for pseudo-hardmask | Ben-Li Sheu, Rajinder Dhindsa, Vinay Pohray, Eric A. Hudson | 2013-06-25 |
| 8440051 | Plasma processing chamber for bevel edge processing | Yunsang Kim | 2013-05-14 |
| 8414790 | Bevel plasma treatment to enhance wet edge clean | Yunsang Kim | 2013-04-09 |
| 8398875 | Method of orienting an upper electrode relative to a lower electrode for bevel edge processing | Gregory Sexton, Alan M. Schoepp, John D. Boniface | 2013-03-19 |
| 8349202 | Methods for controlling bevel edge etching in a plasma chamber | Tong Fang, Yunsang Kim, Olivier Rigoutat, George Stojakovic | 2013-01-08 |
| 8308896 | Methods to remove films on bevel edge and backside of wafer and apparatus thereof | Yunsang Kim | 2012-11-13 |
| 8304262 | Wiggling control for pseudo-hardmask | Ben-Li Sheu, Rajinder Dhindsa, Vinay Pohray, Eric A. Hudson | 2012-11-06 |
| 8298433 | Methods for removing an edge polymer from a substrate | Hyungsuk Alexander Yoon, Yunsang Kim, Jason A. Ryder | 2012-10-30 |
| 8268116 | Methods of and apparatus for protecting a region of process exclusion adjacent to a region of process performance in a process chamber | Yunsang Kim | 2012-09-18 |
| 8257503 | Method and apparatus for detecting plasma unconfinement | Keechan Kim, Yunsang Kim | 2012-09-04 |
| 8252140 | Plasma chamber for wafer bevel edge processing | Gregory Sexton, Andras Kuthi | 2012-08-28 |
| 8236188 | Method for low-K dielectric etch with reduced damage | Bing Ji, Kenji Takeshita, Eric A. Hudson, Maryam Moravej, Stephen M. Sirard +6 more | 2012-08-07 |
| 8225683 | Wafer bow metrology arrangements and methods thereof | — | 2012-07-24 |