Issued Patents All Time
Showing 76–100 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633846 | Internal plasma grid applications for semiconductor fabrication | Do-Young Kim, Gowri Kamarthy, Helene Del Puppo, Jen-Kan Yu, Monica Titus +5 more | 2017-04-25 |
| 9583357 | Systems and methods for reverse pulsing | Maolin Long, Zhongkui Tan, Ying Wu, Qian Fu, John Drewery | 2017-02-28 |
| 9530656 | Temperature control in RF chamber with heater and air amplifier | Jon McChesney | 2016-12-27 |
| 9515633 | Transformer coupled capacitive tuning circuit with fast impedance switching for plasma etch chambers | Maolin Long | 2016-12-06 |
| 9490106 | Internal Faraday shield having distributed chevron patterns and correlated positioning relative to external inner and outer TCP coil | John Drewery, Maolin Long | 2016-11-08 |
| 9484214 | Systems and methods for improving wafer etch non-uniformity when using transformer-coupled plasma | Tom A. Kamp, Arthur H. Sato | 2016-11-01 |
| 9460894 | Controlling ion energy within a plasma chamber | Thorsten Lill, Harmeet Singh, Gowri Kamarthy | 2016-10-04 |
| 9384948 | Hammerhead TCP coil support for high RF power conductor etch systems | Maolin Long | 2016-07-05 |
| 9336996 | Plasma processing systems including side coils and methods related to the plasma processing systems | Maolin Long | 2016-05-10 |
| 9293353 | Faraday shield having plasma density decoupling structure between TCP coil zones | Maolin Long, Ricky Marsh, Ying Wu, John Drewery | 2016-03-22 |
| 9257295 | Ion beam etching system | Harmeet Singh | 2016-02-09 |
| 9245761 | Internal plasma grid for semiconductor fabrication | Harmeet Singh, Thorsten Lill, Vahid Vahedi, Monica Titus, Gowri Kamarthy | 2016-01-26 |
| 9245717 | Gas distribution system for ceramic showerhead of plasma etch reactor | Michael Kang | 2016-01-26 |
| 9230819 | Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processing | Do-Young Kim, Gowri Kamarthy, Helene Del Puppo, Jen-Kan Yu, Monica Titus +5 more | 2016-01-05 |
| 9099398 | Gas distribution showerhead for inductively coupled plasma etch reactor | Michael Kang, Ian Kenworthy | 2015-08-04 |
| 9059678 | TCCT match circuit for plasma etch chambers | Maolin Long, Ricky Marsh | 2015-06-16 |
| 9017526 | Ion beam etching system | Harmeet Singh | 2015-04-28 |
| 8562785 | Gas distribution showerhead for inductively coupled plasma etch reactor | Michael Kang, Ian Kenworthy | 2013-10-22 |
| 7837838 | Method of fabricating a high dielectric constant transistor gate using a low energy plasma apparatus | Thai Cheng Chua, Steven C. H. Hung, Patricia M. Liu, Tatsuya Sato, Valentin N. Todorow +1 more | 2010-11-23 |
| 7678710 | Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system | Thai Cheng Chua, Steven C. H. Hung, Patricia M. Liu, Tatsuya Sato, Valentin Todorov +1 more | 2010-03-16 |
| 7645710 | Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system | Christopher S. Olsen, Thai Cheng Chua, Steven C. H. Hung, Patricia M. Liu, Tatsuya Sato +2 more | 2010-01-12 |
| 7605034 | Integrated circuit memory cells and methods of forming | — | 2009-10-20 |
| 7473596 | Methods of forming memory cells | — | 2009-01-06 |
| 7453112 | Integrated circuit memory cells and methods of forming | — | 2008-11-18 |
| 7431857 | Plasma generation and control using a dual frequency RF source | Steven C. Shannon, Theodoros Panagopoulos, John Holland, Dennis S. Grimard, Yashushi Takakura | 2008-10-07 |