Issued Patents All Time
Showing 101–102 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6727655 | Method and apparatus to monitor electrical states at a workpiece in a semiconductor processing chamber | Jon McChesney, Valentin N. Todorow, John Holland, Michael Barnes | 2004-04-27 |
| 6566272 | Method for providing pulsed plasma during a portion of a semiconductor wafer process | John M. Yamartino, Peter Loewenhardt, Wade Zawalski | 2003-05-20 |