Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566272 | Method for providing pulsed plasma during a portion of a semiconductor wafer process | Alex Paterson, John M. Yamartino, Peter Loewenhardt | 2003-05-20 |
| 6558564 | Plasma energy control by inducing plasma instability | Peter Loewenhardt | 2003-05-06 |
| 6352049 | Plasma assisted processing chamber with separate control of species density | Gerald Yin, Arnold Kolandenko, Hong Ching Shan, Peter Loewenhardt, Chii Guang Lee +9 more | 2002-03-05 |