Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032299 | Metrology method and associated metrology and lithographic apparatuses | Patricius Aloysius Jacobus Tinnemans, Kaustuve Bhattacharyya, Ralph Brinkhof, Leendert Jan KARSSEMEIJER, Stefan Carolus Jacobus Antonius Keij +4 more | 2024-07-09 |
| 11971665 | Wafer alignment using form birefringence of targets or product | Joshua Adams, Yuxiang Lin, Krishanu SHOME, Gerrit Johannes Nijmeijer | 2024-04-30 |
| 11899380 | Apparatus for and method of sensing alignment marks | Krishanu SHOME, Junwon Lee | 2024-02-13 |
| 11513446 | Adaptive alignment | Greger Andersson, Krishanu SHOME, Zahrasadat Dastouri | 2022-11-29 |
| 11493852 | Noise correction for alignment signal | Zahrasadat Dastouri, Greger Andersson, Krishanu SHOME | 2022-11-08 |
| 11175593 | Alignment sensor apparatus for process sensitivity compensation | Simon Reinald HUISMAN, Tamer Elazhary, Yuxiang Lin, Vu Quang TRAN, Sebastianus Adrianus GOORDEN +4 more | 2021-11-16 |
| 11156928 | Alignment mark for two-dimensional alignment in an alignment system | Gerrit Johannes Nijmeijer, Junqiang Zhou, Piotr Jan Meyer, Jeffrey John Lombardo | 2021-10-26 |
| 10928738 | Adaptive filter for in-line correction | Eric Brian Catey, Robert Anthony Augelli, Sergey MALYK | 2021-02-23 |
| 10802208 | Broad spectrum radiation by supercontinuum generation using a tapered optical fiber | King Pui Leung, Tao Chen, Ronan James Havelin, Adel Joobeur, Joseph Carbone | 2020-10-13 |
| 10488767 | Alignment system wafer stack beam analyzer | Krishanu SHOME, Justin Kreuzer, Irit Tzemah | 2019-11-26 |
| 10481507 | Measurement method comprising in-situ printing of apparatus mark and corresponding apparatus | Kevin J. Violette, Haico Victor Kok, Eric Brian Catey | 2019-11-19 |
| 8477289 | Position measurement using natural frequency vibration of a pattern | Daan Maurtis Slotboom, Johan Geerke | 2013-07-02 |
| 8400617 | Lithographic apparatus having a substrate support with open cell plastic foam parts | Engelbertus Antonius Fransiscus Van Der Pasch, Dirk-Jan Bijvoet, Emiel Jozef Melanie Eussen | 2013-03-19 |
| 8264671 | Lithographic apparatus and device manufacturing method | Engelbertus Antonius Fransiscus Van Der Pasch, Johan Geerke, Frederik Eduard De Jong, Marc Van De Grift | 2012-09-11 |