Issued Patents All Time
Showing 25 most recent of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340980 | Plasma showerhead with improved uniformity | Chaowei Wang, Kenneth Brian Doering, Kartik Shah, Kevin Griffin, Hao Zhang | 2025-06-24 |
| 12305283 | Dithering or dynamic offsets for improved uniformity | Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Arkaprava Dan | 2025-05-20 |
| 12119221 | PEALD nitride films | Philip Allan Kraus, Joseph AuBuchon | 2024-10-15 |
| 12077861 | Dithering or dynamic offsets for improved uniformity | Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Arkaprava Dan | 2024-09-03 |
| 11955331 | Method of forming silicon nitride films using microwave plasma | Kelvin Chan, Philip Allan Kraus, Thai Cheng Chua | 2024-04-09 |
| 11823870 | PEALD titanium nitride with direct microwave plasma | Arkaprava Dan, Joseph AuBuchon, Kyoung Ha Kim, Philip Allan Kraus | 2023-11-21 |
| 11761083 | Methods for controlling a flow pulse shape | Joseph AuBuchon, Kevin Griffin | 2023-09-19 |
| 11626281 | PEALD nitride films | Philip Allan Kraus, Joseph AuBuchon | 2023-04-11 |
| 11586789 | Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity | Dhritiman Subha Kashyap, Chaowei Wang, Kartik Shah, Kevin Griffin, Karthik Ramanathan +2 more | 2023-02-21 |
| 11315769 | Plasma source for rotating susceptor | Kallol Bera, Anantha K. Subramani, John C. Forster, Philip Allan Kraus, Farzad Houshmand | 2022-04-26 |
| 11220747 | Complementary pattern station designs | Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Arkaprava Dan | 2022-01-11 |
| 10985009 | Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources | Lakmal C. Kalutarage, Mark Saly, David Thompson, William J. Durand, Kelvin Chan +1 more | 2021-04-20 |
| 10903056 | Plasma source for rotating susceptor | Kallol Bera, Anantha K. Subramani, John C. Forster, Philip Allan Kraus, Farzad Houshmand | 2021-01-26 |
| 9281357 | DRAM MIM capacitor using non-noble electrodes | David Chi, Imran Hashim, Mitsuhiro Horikawa, Sandra G. Malhotra | 2016-03-08 |
| 9224878 | High work function, manufacturable top electrode | Sandra G. Malhotra, Wim Deweerd, Arthur Gevondyan, Hiroyuki Ode | 2015-12-29 |
| 9178006 | Methods to improve electrical performance of ZrO2 based high-K dielectric materials for DRAM applications | Xiangxin Rui, Naonori Fujiwara, Imran Hashim, Kenichi Koyanagi | 2015-11-03 |
| 9178010 | Adsorption site blocking method for co-doping ALD films | Sandra G. Malhotra, Wim Deweerd, Toshiyuki Hirota, Hiroyuki Ode | 2015-11-03 |
| 9082782 | Inexpensive electrode materials to facilitate rutile phase titanium oxide | Toshiyuki Hirota, Pragati Kumar, Xiangxin Rui, Sunil Shanker | 2015-07-14 |
| 8980744 | Inexpensive electrode materials to facilitate rutile phase titanium oxide | Toshiyuki Hirota, Pragati Kumar, Xiangxin Rui, Sunil Shanker | 2015-03-17 |
| 8975147 | Enhanced work function layer supporting growth of rutile phase titanium oxide | Xiangxin Rui, Pragati Kumar, Sandra G. Malhotra | 2015-03-10 |
| 8975633 | Molybdenum oxide top electrode for DRAM capacitors | Wim Deweerd, Hiroyuki Ode | 2015-03-10 |
| 8969169 | DRAM MIM capacitor using non-noble electrodes | David Chi, Imran Hashim, Mitsuhiro Horikawa, Sandra G. Malhotra | 2015-03-03 |
| 8900418 | Yttrium and titanium high-k dielectric films | Imran Hashim, Tony P. Chiang, Indranil De, Nobi Fuchigami, Edward Haywood +3 more | 2014-12-02 |
| 8900422 | Yttrium and titanium high-K dielectric film | Imran Hashim, Indranil De, Tony P. Chiang, Edward Haywood, Nobi Fuchigami +3 more | 2014-12-02 |
| 8901708 | Yttrium and titanium high-k dielectric films | Imran Hashim, Tony P. Chiang, Indranil De, Nobumichi Fuchigami, Edward Haywood +3 more | 2014-12-02 |