Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6755932 | Plasma processing system and apparatus and a sample processing method | Toshio Masuda, Mitsuru Suehiro, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more | 2004-06-29 |
| 6750977 | Apparatus for monitoring thickness of deposited layer in reactor and dry processing method | Toru Otsubo | 2004-06-15 |
| 6716300 | Emission spectroscopic processing apparatus | Tetsunori Kaji, Shizuaki Kimura, Takashi Fujii | 2004-04-06 |
| 6656752 | Ion current density measuring method and instrument, and semiconductor device manufacturing method | Nobuyuki Mise, Masato Ikegawa, Kazuo Nojiri, Kazuyuki Tsunokuni, Tetsuo Ono | 2003-12-02 |
| 6596551 | Etching end point judging method, etching end point judging device, and insulating film etching method using these methods | Ken Yoshioka, Shoji Ikuhara, Kouji Nishihata, Kazue Takahashi, Tetsunori Kaji +1 more | 2003-07-22 |
| 6537832 | Measuring apparatus and film formation method | Toru Otsubo | 2003-03-25 |
| 6503364 | Plasma processing apparatus | Toshio Masuda, Shigeru Shirayone, Kazue Takahashi, Mitsuru Suehiro | 2003-01-07 |
| 6427621 | Plasma processing device and plasma processing method | Masato Ikegawa, Tsutomu Tetsuka, Ichiro Sasaki, Hironobu Kawahara | 2002-08-06 |
| 6373681 | Electrostatic chuck, and method of and apparatus for processing sample using the chuck | Seiichiro Kanno, Ken Yoshioka, Saburo Kanai, Youichi Itou | 2002-04-16 |
| 6243251 | Electrostatic chuck, and method of and apparatus for processing sample using the chuck | Seiichiro Kanno, Ken Yoshioka, Saburo Kanai, Youichi Itou | 2001-06-05 |
| 5946184 | Electrostatic chuck, and method of and apparatus for processing sample | Seiichiro Kanno, Ken Yoshioka, Saburo Kanai, Youichi Itou | 1999-08-31 |
| 5895586 | Plasma processing apparatus and plasma processing method in which a part of the processing chamber is formed using a pre-fluorinated material of aluminum | Tetsunori Kaji, Saburo Kanai, Satoshi Ito, Ryoji Hamasaki, Tetsuo Ono +2 more | 1999-04-20 |
| 5242539 | Plasma treatment method and apparatus | Takao Kumihashi, Kazunori Tsujimoto, Shinichi Tachi, Masafumi Kanetomo, Junichi Kobayashi +1 more | 1993-09-07 |
| 5235399 | Temperature measuring apparatus utilizing radiation | Tomoji Watanabe, Junichi Kobayashi, Takehiko Ooshima, Shunji Sasabe | 1993-08-10 |