Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7455790 | Emission spectroscopic processing apparatus and plasma processing method using it | Tetsunori Kaji, Tatehito Usui, Takashi Fujii | 2008-11-25 |
| 6890771 | Plasma processing method using spectroscopic processing unit | Tetsunori Kaji, Tatehito Usui, Takashi Fujii | 2005-05-10 |
| 6716300 | Emission spectroscopic processing apparatus | Tetsunori Kaji, Tatehito Usui, Takashi Fujii | 2004-04-06 |