Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8767176 | Microlithographic projection exposure apparatus | Yim-Bun Patrick Kwan, Florian Bach, Daniel Benz, Severin Waldis, Armin Werber | 2014-07-01 |
| 8760744 | Correction of optical elements by correction light irradiated in a flat manner | Manfred Maul | 2014-06-24 |
| 8319944 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Wolfgang Singer, Toralf Gruner, Alexander Epple, Norbert Wabra +6 more | 2012-11-27 |
| 8269948 | Projection exposure apparatus and optical system | Bernhard Geuppert | 2012-09-18 |
| 8212991 | Optical system of a microlithographic projection exposure apparatus | Aurelian Dodoc, Albrecht Ehrmann | 2012-07-03 |
| 8027023 | Optical imaging device and method for reducing dynamic fluctuations in pressure difference | Stefan Hembacher, Bernhard Gellrich, Jens Kugler | 2011-09-27 |
| 7990622 | Projection objective of a microlithographic projection exposure apparatus | Olaf Conradi, Boris Bittner, Markus Hauf, Wolfgang Hummel, Arif Kazi +4 more | 2011-08-02 |
| 7830611 | Projection objective of a microlithographic projection exposure apparatus | Olaf Conradi, Markus Hauf, Wolfgang Hummel, Arif Kazi, Baerbel Schwaer +4 more | 2010-11-09 |
| 7782440 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Wolfgang Singer, Toralf Gruner, Alexander Epple, Norbert Wabra +6 more | 2010-08-24 |
| 7777963 | Method for improving the imaging properties of a projection objective, and such a projection objective | Olaf Conradi, Heiko Feldmann, Gerald Richter, Andreas Frommeyer, Toralf Gruner +1 more | 2010-08-17 |