Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |
| 9890455 | Pre-heat ring designs to increase deposition uniformity and substrate throughput | John S. Webb, Masato Ishii, Xuebin Li, Zhiyuan Ye, Ali Zojaji | 2018-02-13 |
| 9695508 | Liner assembly for chemical vapor deposition chamber | David K. Carlson, Mehmet Tugrul Samir | 2017-07-04 |
| 9650726 | Methods and apparatus for deposition processes | Kevin Joseph Bautista, Zhiyuan Ye, Schubert S. Chu, Yihwan Kim | 2017-05-16 |
| 9644267 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch +4 more | 2017-05-09 |
| 9613835 | Heating lamp assembly | Richard O. Collins | 2017-04-04 |
| 9499905 | Methods and apparatus for the deposition of materials on a substrate | Mehmet Tugrul Samir | 2016-11-22 |
| 9277595 | Heating lamp having base to facilitate reduced air flow about the heating lamp | — | 2016-03-01 |
| 9127360 | Epitaxial chamber with cross flow | Balasubramanian Ramachandran, Errol Antonio C. Sanchez, Kevin Joseph Bautista, Harpreet Singh Juneja, Zuoming ZHU | 2015-09-08 |
| 8980005 | Liner assembly for chemical vapor deposition chamber | David K. Carlson, Mehmet Tugrul Samir | 2015-03-17 |
| 8481118 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch +4 more | 2013-07-09 |
| 8388853 | Non-contact substrate processing | Blake Koelmel | 2013-03-05 |
| 8343279 | Apparatuses for atomic layer deposition | Kenric Choi, Shreyas Kher, Pravin K. Narwankar, Steve Poppe, Craig Metzner +1 more | 2013-01-01 |
| 8282992 | Methods for atomic layer deposition of hafnium-containing high-K dielectric materials | Kenric Cho, Shreyas Kher, Pravin K. Narwankar, Steve Poppe, Craig Metzner +1 more | 2012-10-09 |
| 8217574 | Lamp with internal fuse system | Balasubramanian Ramachandran, Joseph M. Ranish, Akio Takahashi | 2012-07-10 |
| 7976631 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch +4 more | 2011-07-12 |
| D613321 | Liner with recessed panels | Kevin Joseph Bautista | 2010-04-06 |
| 7674352 | System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus | David P. Bour, Lori D. Washington, Sandeep Nijhawan, Ronald Stevens, Jacob Smith +5 more | 2010-03-09 |