Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6310755 | Electrostatic chuck having gas cavity and method | Arnold Kholodenko, Shamouil Shamouilian, You Wang, Wing Cheng, Alexander Veytser +4 more | 2001-10-30 |
| 6273958 | Substrate support for plasma processing | Shamouil Shamouilian, Ananda H. Kumar, Siamak Salimian, Mahmoud Dahimene, Michael G. Chafin | 2001-08-14 |
| 6151203 | Connectors for an electrostatic chuck and combination thereof | Shamouil Shamouilian, Ananda H. Kumar, Arnold Kholodenko, Liang Wang, Gerhard Schneider +4 more | 2000-11-21 |
| 6108189 | Electrostatic chuck having improved gas conduits | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2000-08-22 |
| 6095084 | High density plasma process chamber | Shamouil Shamouilian, Ananda H. Kumar, Arnold Kholodenko, Jonathan D. Mohn, Michael G. Chafin +1 more | 2000-08-01 |
| 6074512 | Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam +5 more | 2000-06-13 |
| 6074488 | Plasma chamber support having an electrically coupled collar ring | Craig A. Roderick | 2000-06-13 |
| 5903428 | Hybrid Johnsen-Rahbek electrostatic chuck having highly resistive mesas separating the chuck from a wafer supported thereupon and method of fabricating same | Vijay D. Parkhe, Hyman J. Levinstein, Fusen Chen, Michael G. Chafin | 1999-05-11 |
| 5789324 | Uniform gas flow arrangements | Anthony J. Canale, Randy Dean Cox, Tracy C. Hetrick | 1998-08-04 |
| 5639334 | Uniform gas flow arrangements | Anthony J. Canale, Randy Dean Cox, Tracy C. Hetrick | 1997-06-17 |
| 5636098 | Barrier seal for electrostatic chuck | Joseph F. Salfelder, John F. Cameron, Chandra Deshpandey, Robert E. Ryan, Michael G. Chafin | 1997-06-03 |
| 5605603 | Deep trench process | Neal P. Marmillion | 1997-02-25 |