Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5789324 | Uniform gas flow arrangements | Anthony J. Canale, Dennis S. Grimard, Tracy C. Hetrick | 1998-08-04 |
| 5639334 | Uniform gas flow arrangements | Anthony J. Canale, Dennis S. Grimard, Tracy C. Hetrick | 1997-06-17 |
| 4717448 | Reactive ion etch chemistry for providing deep vertical trenches in semiconductor substrates | Arthur B. Israel, Edward H. Payne | 1988-01-05 |