EP

Edward H. Payne

IBM: 3 patents #26,272 of 70,183Top 40%
Overall (All Time): #1,658,196 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
5221425 Method for reducing foreign matter on a wafer etched in a reactive ion etching process Gary W. Blanchard, Charles R. Bossi, Thomas Warren Weeks, Jr. 1993-06-22
4717448 Reactive ion etch chemistry for providing deep vertical trenches in semiconductor substrates Randy Dean Cox, Arthur B. Israel 1988-01-05
4377633 Methods of simultaneous contact and metal lithography patterning Karen M. Abrahamovich, Clifford J. Hamel, Dean R. Weed 1983-03-22