Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7436645 | Method and apparatus for controlling temperature of a substrate | John Holland, Theodoros Panagopoulos, Alexander Matyushkin, Michael F. Hegarty, Denis M. Koosau +1 more | 2008-10-14 |
| 7264688 | Plasma reactor apparatus with independent capacitive and toroidal plasma sources | Alexander Paterson, Valentin N. Todorow, Theodoros Panagopoulos, Brian K. Hatcher, Edward P. Hammond, IV +2 more | 2007-09-04 |
| 7186943 | MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Yan Ye, Douglas A. Buchberger, Jr., Xiaoye Zhao, Kang-Lie Chiang +2 more | 2007-03-06 |
| 7132618 | MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Yan Ye, Douglas A. Buchberger, Jr., Xiaoye Zhao, Kang-Lie Chiang +2 more | 2006-11-07 |
| 7030335 | Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Gerald Yin, Yan Ye, Douglas A. Buchberger, Jr., Xiaoye Zhao +3 more | 2006-04-18 |
| 6894245 | Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Yan Ye, Douglas A. Buchberger, Jr., Xiaoye Zhao, Kang-Lie Chiang +2 more | 2005-05-17 |
| 6677712 | Gas distribution plate electrode for a plasma receptor | Douglas A. Buchberger, Jr., Yan Ye, Robert B. Hagen, Xiaoye Zhao, Ananda H. Kumar +3 more | 2004-01-13 |
| 6676760 | Process chamber having multiple gas distributors and method | Arnold Kholodenko, Wing Cheng | 2004-01-13 |
| 6586886 | Gas distribution plate electrode for a plasma reactor | Douglas A. Buchberger, Jr., Yan Ye, Robert B. Hagen, Xiaoye Zhao, Ananda H. Kumar +3 more | 2003-07-01 |
| 6471822 | Magnetically enhanced inductively coupled plasma reactor with magnetically confined plasma | Gerald Yin, Peter Loewenhardt, Arnold Kholodenko, Hong Chin Shan, Chii Guang Lee | 2002-10-29 |
| 6189484 | Plasma reactor having a helicon wave high density plasma source | Gerald Yin, Chii Guang Lee, Arnold Kholodenko, Peter Loewenhardt, Hongching Shan +1 more | 2001-02-20 |
| 5429070 | High density plasma deposition and etching apparatus | Gregor A. Campbell, Robert W. Conn, N. William Parker, Alexis de Chambrier | 1995-07-04 |
| 5421891 | High density plasma deposition and etching apparatus | Gregor A. Campbell, Robert W. Conn, N. William Parker, David Ian Charles Pearson | 1995-06-06 |