| 5656141 |
Apparatus for coating substrates |
Hans-Georg Betz, Gregor A. Campbell, Karl Matl, Peter Sommerkamp, Alfons Zoeller +1 more |
1997-08-12 |
| 5429070 |
High density plasma deposition and etching apparatus |
Gregor A. Campbell, Dan Katz, N. William Parker, Alexis de Chambrier |
1995-07-04 |
| 5421891 |
High density plasma deposition and etching apparatus |
Gregor A. Campbell, Dan Katz, N. William Parker, David Ian Charles Pearson |
1995-06-06 |
| 5122251 |
High density plasma deposition and etching apparatus |
Gregor A. Campbell, David C. Pearson, Alexis P. deChambrier, Tatsuo Shoji |
1992-06-16 |
| 5091049 |
High density plasma deposition and etching apparatus |
Gregor A. Campbell, Tatsuo Shoji |
1992-02-25 |
| 4990229 |
High density plasma deposition and etching apparatus |
Gregor A. Campbell, Tatsuo Shoji |
1991-02-05 |
| 4885070 |
Method and apparatus for the application of materials |
Gregor A. Campbell, Dan M. Goebel, Rolf Adam, Hans Aichert, Hans-Georg Betz +7 more |
1989-12-05 |