Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5656141 | Apparatus for coating substrates | Hans-Georg Betz, Gregor A. Campbell, Karl Matl, Peter Sommerkamp, Alfons Zoeller +1 more | 1997-08-12 |
| 5429070 | High density plasma deposition and etching apparatus | Gregor A. Campbell, Dan Katz, N. William Parker, Alexis de Chambrier | 1995-07-04 |
| 5421891 | High density plasma deposition and etching apparatus | Gregor A. Campbell, Dan Katz, N. William Parker, David Ian Charles Pearson | 1995-06-06 |
| 5122251 | High density plasma deposition and etching apparatus | Gregor A. Campbell, David C. Pearson, Alexis P. deChambrier, Tatsuo Shoji | 1992-06-16 |
| 5091049 | High density plasma deposition and etching apparatus | Gregor A. Campbell, Tatsuo Shoji | 1992-02-25 |
| 4990229 | High density plasma deposition and etching apparatus | Gregor A. Campbell, Tatsuo Shoji | 1991-02-05 |
| 4885070 | Method and apparatus for the application of materials | Gregor A. Campbell, Dan M. Goebel, Rolf Adam, Hans Aichert, Hans-Georg Betz +7 more | 1989-12-05 |