Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5122251 | High density plasma deposition and etching apparatus | Gregor A. Campbell, Robert W. Conn, Alexis P. deChambrier, Tatsuo Shoji | 1992-06-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5122251 | High density plasma deposition and etching apparatus | Gregor A. Campbell, Robert W. Conn, Alexis P. deChambrier, Tatsuo Shoji | 1992-06-16 |