Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5122251 | High density plasma deposition and etching apparatus | Gregor A. Campbell, Robert W. Conn, David C. Pearson, Tatsuo Shoji | 1992-06-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5122251 | High density plasma deposition and etching apparatus | Gregor A. Campbell, Robert W. Conn, David C. Pearson, Tatsuo Shoji | 1992-06-16 |