Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5429070 | High density plasma deposition and etching apparatus | Gregor A. Campbell, Robert W. Conn, Dan Katz, N. William Parker | 1995-07-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5429070 | High density plasma deposition and etching apparatus | Gregor A. Campbell, Robert W. Conn, Dan Katz, N. William Parker | 1995-07-04 |