| 9529269 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans |
2016-12-27 |
| 9523921 |
EUV radiation system and lithographic apparatus |
Antonius Johannes Josephus Van Dijsseldonk |
2016-12-20 |
| 9516732 |
Radiation source |
Christian Wagner |
2016-12-06 |
| 9482960 |
Pellicle for reticle and multilayer mirror |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2016-11-01 |
| 9482966 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hendricus Johannes Maria Meijer +8 more |
2016-11-01 |
| 9482962 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2016-11-01 |
| 9477160 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2016-10-25 |
| 9442388 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson, Hendricus Johannes Maria Meijer +3 more |
2016-09-13 |
| 9411250 |
Radiation system and lithographic apparatus |
Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Vladimir Mihailovitch Krivtsun |
2016-08-09 |
| 9414477 |
Radiation source, lithographic apparatus and device manufacturing method |
Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels |
2016-08-09 |
| 9395630 |
Lithographic apparatus and method |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2016-07-19 |
| 9366972 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Hendricus Johannes Maria Meijer +9 more |
2016-06-14 |
| 9360765 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Johannes Catharinus Hubertus Mulkens +4 more |
2016-06-07 |
| 9363879 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +4 more |
2016-06-07 |
| 9354529 |
Arrangement for use in a projection exposure tool for microlithography having a reflective optical element |
Dirk Heinrich Ehm, Maarten Van Kampen, Stefan Schmidt, Vadim Yevgenyevich Banine |
2016-05-31 |
| 9354502 |
Lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method for providing setpoint data and a computer program |
Martinus Hendricus Hoeks |
2016-05-31 |
| 9329500 |
Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor |
Frank Staals, Joeri Lof, Wim Tjibbo Tel, Bearrach Moest |
2016-05-03 |
| 9298110 |
Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device |
Jens Arno Steinhoff, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Hendrik Antony Johannes Neerhof, Adrianus Johannes Maria Van Dijk +2 more |
2016-03-29 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Aschwin Lodewijk Hendricus Johannes Vermeer, Jeroen Johannes Sophia Maria Mertens +20 more |
2016-02-23 |
| 9268236 |
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder |
Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Martinus Hendrikus Antonius Leenders +6 more |
2016-02-23 |