Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513561 | Lithographic apparatus, method for maintaining a lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Theodorus Petrus Maria Cadee | 2016-12-06 |
| 9494869 | Lithographic apparatus and device manufacturing method | Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Sven Antoin Johan Hol, Harmen Klaas Van Der Schoot +9 more | 2016-11-15 |
| 9354502 | Lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method for providing setpoint data and a computer program | Erik Roelof Loopstra | 2016-05-31 |