Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513561 | Lithographic apparatus, method for maintaining a lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Martinus Hendricus Hoeks | 2016-12-06 |
| 9494869 | Lithographic apparatus and device manufacturing method | Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol +9 more | 2016-11-15 |
| 9470969 | Support, lithographic apparatus and device manufacturing method | Koen Jacobus Johannes Maria Zaal, Harmeet Singh | 2016-10-18 |
| 9410796 | Lithographic apparatus and method | Ruud Antonius Catharina Maria Beerens, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen, Raymond Wilhelmus Louis Lafarre | 2016-08-09 |
| 9329501 | Lithographic apparatus, method of deforming a substrate table and device manufacturing method | Yang-Shan Huang, Hans Butler, Jan Van Eijk, Sven Antoin Johan Hol, Engelbertus Antonius Fransiscus Van Der Pasch +3 more | 2016-05-03 |
| 9268242 | Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor | Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer, Jeroen Johannes Sophia Maria Mertens +20 more | 2016-02-23 |
| 9261798 | Lithographic apparatus and device manufacturing method | Yang-Shan Huang | 2016-02-16 |