Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494869 | Lithographic apparatus and device manufacturing method | Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol +9 more | 2016-11-15 |
| 9470969 | Support, lithographic apparatus and device manufacturing method | Theodorus Petrus Maria Cadee, Harmeet Singh | 2016-10-18 |
| 9436096 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens | 2016-09-06 |