| 9507278 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2016-11-29 |
| 9488919 |
Substrate table, a lithographic apparatus and a method involving an encoder plate |
Takeshi Kaneko, Raymond Wilhelmus Louis Lafarre |
2016-11-08 |
| 9436096 |
Lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal |
2016-09-06 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2016-02-23 |
| 9268236 |
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder |
Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Martinus Hendrikus Antonius Leenders +6 more |
2016-02-23 |
| 9235113 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Edwin Cornelis Kadijk, Sergei Shulepov |
2016-01-12 |
| 9229340 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent, Frank Staals +2 more |
2016-01-05 |