| 9529277 |
Lithographic apparatus and device manufacturing method |
Jan Steven Christiaan Westerlaken, Gerardus Arnoldus Hendricus Franciscus Janssen, Peter Paul Steijaert, Franciscus Van De Mast |
2016-12-27 |
| 9470988 |
Substrate positioning system, lithographic apparatus and device manufacturing method |
Albert Johannes Maria Jansen, Andre Bernardus Jeunink, Johannes Mathias Theodorus Antonius Adriaens, Frank Auer, Peterjan Broomans +4 more |
2016-10-18 |
| 9410796 |
Lithographic apparatus and method |
Ruud Antonius Catharina Maria Beerens, Johannes Petrus Martinus Bernardus Vermeulen, Theodorus Petrus Maria Cadee, Raymond Wilhelmus Louis Lafarre |
2016-08-09 |
| 9329501 |
Lithographic apparatus, method of deforming a substrate table and device manufacturing method |
Yang-Shan Huang, Hans Butler, Jan Van Eijk, Sven Antoin Johan Hol, Bastiaan Lambertus Wilhelmus Marinus Van De Ven +3 more |
2016-05-03 |
| 9316928 |
Stage apparatus, lithographic apparatus and method of positioning an object table |
Emiel Jozef Melanie Eussen, Andre Bernardus Jeunink, Robbert Edgar Van Leeuwen |
2016-04-19 |
| 9268211 |
Lithographic apparatus, and patterning device for use in a lithographic process |
Jan Van Eijk, Johannes Petrus Martinus Bernardus Vermeulen |
2016-02-23 |
| 9229340 |
Lithographic apparatus |
Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent, Frank Staals +2 more |
2016-01-05 |