Issued Patents 2016
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507275 | Support apparatus, lithographic apparatus and device manufacturing method | Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more | 2016-11-29 |
| 9507274 | Substrate holder and method of manufacturing a substrate holder | Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2016-11-29 |
| 9488919 | Substrate table, a lithographic apparatus and a method involving an encoder plate | Takeshi Kaneko, Joost Jeroen Ottens | 2016-11-08 |
| 9454089 | Substrate table, a lithographic apparatus and a device manufacturing method | Nicolaas Ten Kate | 2016-09-27 |
| 9442395 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2016-09-13 |
| 9423699 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade | 2016-08-23 |
| 9410796 | Lithographic apparatus and method | Ruud Antonius Catharina Maria Beerens, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen, Theodorus Petrus Maria Cadee | 2016-08-09 |
| 9389518 | Stage system and a lithographic apparatus | Antonius Franciscus Johannes De Groot, Yang-Shan Huang, Sander Christiaan Broers, Peter Laurentius Maria Ros | 2016-07-12 |
| 9354528 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Jan Bex, Nicolaas Ten Kate, Johannes Wilhelmus Damen, Eugene Maria Brinkhof, Yogesh Pramod Karade | 2016-05-31 |
| 9316927 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg, Peter Van Delft | 2016-04-19 |
| 9298107 | Lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Koen Steffens, Takeshi Kaneko +5 more | 2016-03-29 |
| 9298104 | Substrate holder, lithographic apparatus, and device manufacturing method | Siegfried Alexander Tromp, Nicolaas Ten Kate | 2016-03-29 |
| 9268238 | Substrate table, a lithographic apparatus and a device manufacturing method | Nicolaas Ten Kate | 2016-02-23 |
| 9256139 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Siegfried Alexander Tromp, Jacobus Josephus Leijssen +3 more | 2016-02-09 |