| 9507274 |
Substrate holder and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2016-11-29 |
| 9507278 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2016-11-29 |
| 9507275 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more |
2016-11-29 |
| 9488923 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2016-11-08 |
| 9454089 |
Substrate table, a lithographic apparatus and a device manufacturing method |
Raymond Wilhelmus Louis Lafarre |
2016-09-27 |
| 9448494 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Sergei Shulepov |
2016-09-20 |
| 9442395 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2016-09-13 |
| 9429853 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper +2 more |
2016-08-30 |
| 9423699 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade |
2016-08-23 |
| 9354528 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Jan Bex, Raymond Wilhelmus Louis Lafarre, Johannes Wilhelmus Damen, Eugene Maria Brinkhof, Yogesh Pramod Karade |
2016-05-31 |
| 9298104 |
Substrate holder, lithographic apparatus, and device manufacturing method |
Siegfried Alexander Tromp, Raymond Wilhelmus Louis Lafarre |
2016-03-29 |
| 9268238 |
Substrate table, a lithographic apparatus and a device manufacturing method |
Raymond Wilhelmus Louis Lafarre |
2016-02-23 |
| 9268236 |
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder |
Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +6 more |
2016-02-23 |
| 9256139 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Siegfried Alexander Tromp, Jacobus Josephus Leijssen +3 more |
2016-02-09 |
| 9235138 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more |
2016-01-12 |