Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442390 | Fluid handling structure including gas supply and gas recovery openings, a lithographic apparatus and a device manufacturing method | Michel Riepen, Cornelius Maria Rops | 2016-09-13 |
| 9291914 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | David Bessems, Marcus Johannes Van Der Zanden, Cornelius Maria Rops, Paul A. Willems, Jimmy Matheus Wilhelmus Van De Winkel +1 more | 2016-03-22 |
| 9256136 | Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply | Paulus Martinus Maria Liebregts, Michel Riepen, Fabrizio Evangelista | 2016-02-09 |
| 9235138 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more | 2016-01-12 |