Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9291914 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Marcus Johannes Van Der Zanden, Cornelius Maria Rops, Paul A. Willems, Jimmy Matheus Wilhelmus Van De Winkel +1 more | 2016-03-22 |