Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442390 | Fluid handling structure including gas supply and gas recovery openings, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Michel Riepen | 2016-09-13 |
| 9291914 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | David Bessems, Rogier Hendrikus Magdalena Cortie, Marcus Johannes Van Der Zanden, Paul A. Willems, Jimmy Matheus Wilhelmus Van De Winkel +1 more | 2016-03-22 |
| 9235138 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns +1 more | 2016-01-12 |
| 9229334 | Lithographic apparatus and a device manufacturing method | Nicolaas Rudolf Kemper, Michel Riepen | 2016-01-05 |