Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9291914 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | David Bessems, Rogier Hendrikus Magdalena Cortie, Marcus Johannes Van Der Zanden, Cornelius Maria Rops, Paul A. Willems +1 more | 2016-03-22 |
| 9274436 | Lithographic apparatus and a device manufacturing method | Theodorus Wilhelmus Polet, Henrikus Herman Marie Cox, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Gregory Martin Mason Corcoran +1 more | 2016-03-01 |