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Lithographic apparatus and device manufacturing method |
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2016-10-25 |
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Fluid handling structure including gas supply and gas recovery openings, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Cornelius Maria Rops |
2016-09-13 |
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Source-collector device, lithographic apparatus, and device manufacturing method |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Martinus Cornelis Maria Verhagen +5 more |
2016-08-09 |
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Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Danny Maria Hubertus Philips, Clemens Johannes Gerardus Van Den Dungen +2 more |
2016-07-05 |
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Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2016-02-23 |
| 9256136 |
Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply |
Rogier Hendrikus Magdalena Cortie, Paulus Martinus Maria Liebregts, Fabrizio Evangelista |
2016-02-09 |
| 9235138 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more |
2016-01-12 |
| 9229334 |
Lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Nicolaas Rudolf Kemper |
2016-01-05 |
| 9229335 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more |
2016-01-05 |