Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9477153 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more | 2016-10-25 |
| 9465302 | Lithographic apparatus | Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +7 more | 2016-10-11 |
| 9256136 | Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply | Rogier Hendrikus Magdalena Cortie, Michel Riepen, Fabrizio Evangelista | 2016-02-09 |