| 9507907 |
Computational wafer inspection |
Christophe David Fouquet, Bernardo Kastrup, Arie Jeffrey Den Boef, James Benedict Kavanagh, James Patrick Koonmen +1 more |
2016-11-29 |
| 9482966 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Erik Roelof Loopstra +8 more |
2016-11-01 |
| 9482962 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Bob Streefkerk, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2016-11-01 |
| 9477160 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2016-10-25 |
| 9477159 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk |
2016-10-25 |
| 9465302 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Erik Henricus Egidius Catharina Eummelen +7 more |
2016-10-11 |
| 9459537 |
System and method to ensure source and image stability |
Yu Cao, Jun Ye, Venugopal Vellanki |
2016-10-04 |
| 9442388 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson +3 more |
2016-09-13 |
| 9417519 |
Lithographic apparatus, device manufacturing method, and method of correcting a mask |
— |
2016-08-16 |
| 9366972 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2016-06-14 |
| 9360765 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2016-06-07 |
| 9330912 |
Lithographic apparatus, fluid combining unit and device manufacturing method |
Matthew Lipson, Harry Sewell, Louis John Markoya |
2016-05-03 |
| 9285685 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graupner +1 more |
2016-03-15 |