Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442388 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Matthew Lipson, Hendricus Johannes Maria Meijer +3 more | 2016-09-13 |
| 9423701 | Lithographic method and assembly | Shaoxian Zhang, Johannes Jacobus Matheus Baselmans | 2016-08-23 |
| 9304411 | Lithographic method and apparatus | Johannes Jacobus Matheus Baselmans | 2016-04-05 |