Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442388 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Hendricus Johannes Maria Meijer +3 more | 2016-09-13 |
| 9348236 | Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp | Peter HELMUS, Ronald A. Wilklow, James Kennon, Kennard White, Wilbur Jordan Reichmann, II | 2016-05-24 |
| 9330912 | Lithographic apparatus, fluid combining unit and device manufacturing method | Johannes Catharinus Hubertus Mulkens, Harry Sewell, Louis John Markoya | 2016-05-03 |