Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330912 | Lithographic apparatus, fluid combining unit and device manufacturing method | Johannes Catharinus Hubertus Mulkens, Matthew Lipson, Louis John Markoya | 2016-05-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330912 | Lithographic apparatus, fluid combining unit and device manufacturing method | Johannes Catharinus Hubertus Mulkens, Matthew Lipson, Louis John Markoya | 2016-05-03 |