Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9348236 | Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp | Peter HELMUS, Matthew Lipson, Ronald A. Wilklow, James Kennon, Kennard White | 2016-05-24 |