Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507907 | Computational wafer inspection | Christophe David Fouquet, Bernardo Kastrup, Johannes Catharinus Hubertus Mulkens, James Benedict Kavanagh, James Patrick Koonmen +1 more | 2016-11-29 |
| 9506743 | Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method | Justin Kreuzer, Simon Gijsbert Josephus Mathijssen, Gerrit Johannes Nijmeijer, J. Christian Swindal, Patricius Aloysius Jacobus Tinnemans +1 more | 2016-11-29 |
| 9494872 | Inspection method for lithography | Kaustuve Bhattacharyya, Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar | 2016-11-15 |
| 9488922 | Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices | Yuri Vainer, Vadim Yevgenyevich Banine, Luigi Scaccabarozzi | 2016-11-08 |
| 9303978 | Optical apparatus, method of scanning, lithographic apparatus and device manufacturing method | — | 2016-04-05 |
| 9279657 | Level sensor arrangement in a lithographic apparatus for measuring multi-layer surfaces | Simon Gijsbert Josephus Mathijssen | 2016-03-08 |
| 9235141 | Inspection apparatus and method for measuring a property of a substrate | Maurits Van Der Schaar, Everhardus Cornelis Mos, Andreas Fuchs, Martyn John Coogans, Hendrik Jan Hidde Smilde | 2016-01-12 |