Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9331022 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Maurits Van Der Schaar, Patrick Warnaar, Kaustuve Bhattacharyya, Michael Kubis | 2016-05-03 |
| 9255892 | Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar | 2016-02-09 |
| 9235141 | Inspection apparatus and method for measuring a property of a substrate | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Everhardus Cornelis Mos, Andreas Fuchs, Martyn John Coogans | 2016-01-12 |
| 9229338 | Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar | 2016-01-05 |