Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529278 | Inspection apparatus to detect a target located within a pattern for lithography | — | 2016-12-27 |
| 9494872 | Inspection method for lithography | Kaustuve Bhattacharyya, Arie Jeffrey Den Boef, Maurits Van Der Schaar | 2016-11-15 |
| 9482967 | Lithographic apparatus, control system and device manufacturing method | Johannes Henricus Wilhelmus Jacobs, Tammo Uitterdijk, Nicolas Lallemant | 2016-11-01 |
| 9436099 | Lithographic focus and dose measurement using a 2-D target | Christian Marinus Leewis, Hugo Augustinus Joseph Cramer, Johannes Anna Quaedackers, Christine Corinne Mattheus | 2016-09-06 |
| 9316919 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Mark Kroon, Kees Van Weert | 2016-04-19 |
| 9280065 | Inspection apparatus to detect a target located within a pattern for lithography | — | 2016-03-08 |
| 9255892 | Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus | Maurits Van Der Schaar, Hendrik Jan Hidde Smilde | 2016-02-09 |
| 9229338 | Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus | Maurits Van Der Schaar, Hendrik Jan Hidde Smilde | 2016-01-05 |