Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436099 | Lithographic focus and dose measurement using a 2-D target | Christian Marinus Leewis, Hugo Augustinus Joseph Cramer, Marcus Adrianus Van De Kerkhof, Christine Corinne Mattheus | 2016-09-06 |
| 9268242 | Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more | 2016-02-23 |