Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436099 | Lithographic focus and dose measurement using a 2-D target | Christian Marinus Leewis, Marcus Adrianus Van De Kerkhof, Johannes Anna Quaedackers, Christine Corinne Mattheus | 2016-09-06 |