Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9268242 | Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +20 more | 2016-02-23 |