| 9507275 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more |
2016-11-29 |
| 9482967 |
Lithographic apparatus, control system and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Tammo Uitterdijk, Nicolas Lallemant |
2016-11-01 |
| 9429853 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2016-08-30 |
| 9280063 |
Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Sjoerd Nicolaas Lambertus Donders, Martijn Houben, Thibault Simon Mathieu Laurent, Frank Johannes Jacobus Van Boxtel +1 more |
2016-03-08 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer, Jeroen Johannes Sophia Maria Mertens +20 more |
2016-02-23 |
| 9268236 |
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder |
Igor Petrus Maria Bouchoms, Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +6 more |
2016-02-23 |
| 9229340 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, William Peter Van Drent, Frank Staals +2 more |
2016-01-05 |